China Custom High Capacity Roots Vacuum Booster Pumps for Chemical Process Industries vacuum pump ac

Product Description

MBE36000 Mechanical Boosters / Roots Vacuum Pumps /

Our MB-C, MB-E, and MB-Y mechanical vacuum booster are oil free vacuum pumps that are running together with the backing pumps for all rough and high-vacuum applications where large pumping speeds are needed. Our vacuum boosters operate totally contact-free and with no sealing fluids such as oil or water exiting in the vacuum chamber. MB-Y vacuum boosters are equipped with bypass valve.

Economical
Due to the large number of available models, the pumping speed and ultimate vacuum can be customized exactly according to specific processes. The high pumping efficiency ensures further increase in the economy of operating costs.

Safe operation
Tried-and-tested engineering technology together with a robust design enables safe operation to happen. The MB-Y series’ integrated bypass valve allows the vacuum boosters to operate at a high pressure level.

Technical date 50HZ MBE36000
Pumping Speed m3/h 36000
L/S 10000
Ultimate pressure Pa ≤0.05
Max.Differential pressure Pa ≥3×103
Power kw 55
Motor synchronous speed rpm 1450
Air inlet mm 500
Air outlet mm 400
Weight kg 5000
Recommend backing pump models MBE4300/SRV0630

 

Application Ranges

  • Metallurgy
  • Simulation chambers
  • Packaging industry
  • Freeze/vacuum-drying
  • Thin-film technology
  • Electron beam welding
  • Chemistry and process technology
  • Industrial leak detection systems
  • Steel degassing
  • Load-lock chambers
  • vacuum impregnation
  • vacuum degass
  • vacuum pre-discharging
  • gas exhausting
  • Glass and wear protection coating
  • Decorative coating
  • Vacuum furnaces
  • Space simulation chambers
  • for the processes in vacuum distillation, vacuum concentration and vacuum drying in chemical industry, medicine, food and beverage, light industry and textile industry 

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Oil or Not: Oil Free
Structure: Roots Vacuum Pump
Exhauster Method: Kinetic Vacuum Pump
Vacuum Degree: Vacuum
Work Function: Maintain the Pump
Working Conditions: Dry
Customization:
Available

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vacuum pump

What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?

Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:

Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.

Here are some key roles of vacuum pumps in semiconductor manufacturing:

1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.

2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.

3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.

4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.

5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.

6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.

7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.

8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.

Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.

Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.

vacuum pump

How Do Vacuum Pumps Affect the Performance of Vacuum Chambers?

When it comes to the performance of vacuum chambers, vacuum pumps play a critical role. Here’s a detailed explanation:

Vacuum chambers are enclosed spaces designed to create and maintain a low-pressure environment. They are used in various industries and scientific applications, such as manufacturing, research, and material processing. Vacuum pumps are used to evacuate air and other gases from the chamber, creating a vacuum or low-pressure condition. The performance of vacuum chambers is directly influenced by the characteristics and operation of the vacuum pumps used.

Here are some key ways in which vacuum pumps affect the performance of vacuum chambers:

1. Achieving and Maintaining Vacuum Levels: The primary function of vacuum pumps is to create and maintain the desired vacuum level within the chamber. Vacuum pumps remove air and other gases, reducing the pressure inside the chamber. The efficiency and capacity of the vacuum pump determine how quickly the desired vacuum level is achieved and how well it is maintained. High-performance vacuum pumps can rapidly evacuate the chamber and maintain the desired vacuum level even when there are gas leaks or continuous gas production within the chamber.

2. Pumping Speed: The pumping speed of a vacuum pump refers to the volume of gas it can remove from the chamber per unit of time. The pumping speed affects the rate at which the chamber can be evacuated and the time required to achieve the desired vacuum level. A higher pumping speed allows for faster evacuation and shorter cycle times, improving the overall efficiency of the vacuum chamber.

3. Ultimate Vacuum Level: The ultimate vacuum level is the lowest pressure that can be achieved in the chamber. It depends on the design and performance of the vacuum pump. Higher-quality vacuum pumps can achieve lower ultimate vacuum levels, which are important for applications requiring higher levels of vacuum or for processes that are sensitive to residual gases.

4. Leak Detection and Gas Removal: Vacuum pumps can also assist in leak detection and gas removal within the chamber. By continuously evacuating the chamber, any leaks or gas ingress can be identified and addressed promptly. This ensures that the chamber maintains the desired vacuum level and minimizes the presence of contaminants or unwanted gases.

5. Contamination Control: Some vacuum pumps, such as oil-sealed pumps, use lubricating fluids that can introduce contaminants into the chamber. These contaminants may be undesirable for certain applications, such as semiconductor manufacturing or research. Therefore, the choice of vacuum pump and its potential for introducing contaminants should be considered to maintain the required cleanliness and purity of the vacuum chamber.

6. Noise and Vibrations: Vacuum pumps can generate noise and vibrations during operation, which can impact the performance and usability of the vacuum chamber. Excessive noise or vibrations can interfere with delicate experiments, affect the accuracy of measurements, or cause mechanical stress on the chamber components. Selecting vacuum pumps with low noise and vibration levels is important for maintaining optimal chamber performance.

It’s important to note that the specific requirements and performance factors of a vacuum chamber can vary depending on the application. Different types of vacuum pumps, such as rotary vane pumps, dry pumps, or turbomolecular pumps, offer varying capabilities and features that cater to specific needs. The choice of vacuum pump should consider factors such as the desired vacuum level, pumping speed, ultimate vacuum, contamination control, noise and vibration levels, and compatibility with the chamber materials and gases used.

In summary, vacuum pumps have a significant impact on the performance of vacuum chambers. They enable the creation and maintenance of the desired vacuum level, affect the pumping speed and ultimate vacuum achieved, assist in leak detection and gas removal, and influence contamination control. Careful consideration of the vacuum pump selection ensures optimal chamber performance for various applications.

vacuum pump

What Are the Primary Applications of Vacuum Pumps?

Vacuum pumps have a wide range of applications across various industries. Here’s a detailed explanation:

1. Industrial Processes:

Vacuum pumps play a vital role in numerous industrial processes, including:

– Vacuum Distillation: Vacuum pumps are used in distillation processes to lower the boiling points of substances, enabling separation and purification of various chemicals and compounds.

– Vacuum Drying: Vacuum pumps aid in drying processes by creating a low-pressure environment, which accelerates moisture removal from materials without excessive heat.

– Vacuum Packaging: Vacuum pumps are used in the food industry to remove air from packaging containers, prolonging the shelf life of perishable goods by reducing oxygen exposure.

– Vacuum Filtration: Filtration processes can benefit from vacuum pumps to enhance filtration rates by applying suction, facilitating faster separation of solids and liquids.

2. Laboratory and Research:

Vacuum pumps are extensively used in laboratories and research facilities for various applications:

– Vacuum Chambers: Vacuum pumps create controlled low-pressure environments within chambers for conducting experiments, testing materials, or simulating specific conditions.

– Mass Spectrometry: Mass spectrometers often utilize vacuum pumps to create the necessary vacuum conditions for ionization and analysis of samples.

– Freeze Drying: Vacuum pumps enable freeze-drying processes, where samples are frozen and then subjected to a vacuum, allowing the frozen water to sublimate directly from solid to vapor state.

– Electron Microscopy: Vacuum pumps are essential for electron microscopy techniques, providing the necessary vacuum environment for high-resolution imaging of samples.

3. Semiconductor and Electronics Industries:

High vacuum pumps are critical in the semiconductor and electronics industries for manufacturing and testing processes:

– Semiconductor Fabrication: Vacuum pumps are used in various stages of chip manufacturing, including deposition, etching, and ion implantation processes.

– Thin Film Deposition: Vacuum pumps create the required vacuum conditions for depositing thin films of materials onto substrates, as done in the production of solar panels, optical coatings, and electronic components.

– Leak Detection: Vacuum pumps are utilized in leak testing applications to detect and locate leaks in electronic components, systems, or pipelines.

4. Medical and Healthcare:

Vacuum pumps have several applications in the medical and healthcare sectors:

– Vacuum Assisted Wound Closure: Vacuum pumps are used in negative pressure wound therapy (NPWT), where they create a controlled vacuum environment to promote wound healing and removal of excess fluids.

– Laboratory Equipment: Vacuum pumps are essential in medical and scientific equipment such as vacuum ovens, freeze dryers, and centrifugal concentrators.

– Anesthesia and Medical Suction: Vacuum pumps are utilized in anesthesia machines and medical suction devices to create suction and remove fluids or gases from the patient’s body.

5. HVAC and Refrigeration:

Vacuum pumps are employed in the HVAC (Heating, Ventilation, and Air Conditioning) and refrigeration industries:

– Refrigeration and Air Conditioning Systems: Vacuum pumps are used during system installation, maintenance, and repair to evacuate moisture and air from refrigeration and air conditioning systems, ensuring efficient operation.

– Vacuum Insulation Panels: Vacuum pumps are utilized in the manufacturing of vacuum insulation panels, which offer superior insulation properties for buildings and appliances.

6. Power Generation:

Vacuum pumps play a role in power generation applications:

– Steam Condenser Systems: Vacuum pumps are used in power plants to remove non-condensable gases from steam condenser systems, improving thermal efficiency.

– Gas Capture: Vacuum pumps are utilized to capture and remove gases, such as hydrogen or helium, in nuclear power plants, research reactors, or particle accelerators.

These are just a few examples of the primary applications of vacuum pumps. The versatility and wide range of vacuum pump types make them essential in numerous industries, contributing to various manufacturing processes, research endeavors, and technological advancements.

China Custom High Capacity Roots Vacuum Booster Pumps for Chemical Process Industries   vacuum pump acChina Custom High Capacity Roots Vacuum Booster Pumps for Chemical Process Industries   vacuum pump ac
editor by CX 2024-04-16

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